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Helium Leak Detection

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Pfeiffer ASM 390 Helium Leak Detector

Pfeiffer ASM 390 & ASM 392 Mobile Helium Leak DetectorThe Pfeiffer ASM 390 high performance mobile leak detector provides high performance, reliability and easy operation.  The ASM 390 is a mobile leak detector optimized for rapid pump down and short response times on large test objects.  It combines a dry frictionless backing pump with a powerful high vacuum pump in a slim design that can be used in vacuum or sniffing test modes.   A minimum detectable leak rate for helium of 1 · 10-8 in sniffing mode and  1 · 10-12 in vacuum mode.

The ASM 390 has a powerful high vacuum pump with a 35 m3/h backing capacity.  The ASM 390 has a color display panel with 360° viewing: it is detachable and can be positioned for user convenience and usability with magnetic clips.   This mobile helium leak detection unit is ideal for applications that demand maximum testing sensitivity.

 

Pfeiffer ASM 390 High Performance Mobile Leak Detector Features

  • Performance, sensitivity and mobility
  • High roughing capacity using particle-free, clean ACP pump
  • Clean room compatible
  • Compact, small footprint
  • Semi S2 compliant
  • Color touch display with 360° viewing
  • Minimum detectable leak rate 1 · 10-8 in sniffing mode
  • Minimum detectable leak rate 1 · 10-12 in vacuum mode
  • Rugged design, can handle severe environments
  • An inlet in the front for easy connection to test ports
  • Compatible with wireless remote control RC 500 WL
  • Range of I/O interfaces
  • Intuitive menus
  • Integrated SD memory card to store test data

Pfeiffer ASM 390 High Performance Helium Leak Detector Applications

  • Analytics
    • Electron Microscopy
    • Leak Detection
    • Mass spectrometry
    • Surface analysis
    • Residual gas analysis
  • Semiconductor
    • PVD (Physical Vapor Deposition)
    • CVD (Chemical Vapor Deposition)
    • Plasma etching
    • Implantation -Source
    • Implantation- Beamline
    • Inspection
    • Bonding
    • MBE (Molecular Beam Epitaxy)
    • Load-locks, transfer chambers, handling systems
  •  Coating
    • FPD – Flat Panel Display
    • Photovoltaics
    • Glass coating (PVD)
    • Optical Coating
    • Wear protection (PVD, CVD)
    • Web coating
  • Industry
    • Industrial leak detection
    • Solar industry
    • Electronics
    • Vacuum components
    • Vacuum drying
  • R & D
    • Nuclear research
    • Fusion technology
    • Plasma research
    • Particle accelerators
    • Space simulation
    • Cryogenic research
    • Elementary particle physics
    • Nanotechnology
    • Medical technology

 

Pfeiffer ASM 390 High Performance Leak Detector Specifications

Pfeiffer Vacuum Units ASM 390 ASM 392
Test Method Vacuum & Sniffing Vacuum & Sniffing
Detectable gases 4He,3He,H2 4He,3He,H2
Min detectable leak – vacuum mbar l/s ≤ 1 · 10-12 ≤ 1 · 10-12
Min detectable leak – sniffing mbar l/s ≤ 1 · 10-8 ≤ 1 · 10-8
Pumping speed for He l/s 10 25
Maximum inlet test pressure mbar 20 20
Primary pump type high vacuum pump high vacuum pump
Backing pump type friction-less ACP pump friction-less ACP pump
Additional pump type — turbopump
Backing Pump Capacity m3/h 35 35
I/O Interface — RS232, Digital, Analog RS232, Digital, Analog
Noise Level dB(A) ≤55 ≤55
Start-up time (20° C) min <2 <2
Operating Temp celsius 10° to 35° 10° to 35°
Dimensions mm 1072 x 454 x 1025 1072 x 454 x 1025
Weight kg 125 130

Related Datasheets and Documents

Pfeiffer ASM 390 ASM 392 Datasheet