Edwards ELD500 DRY is a mobile helium leak detector with an integrated helium optimized diaphragm pump.
Ready to go in under 2 minutes, the ELD500 is a portable leak detector designed for fast accurate leak detection in a wide range of applications. It has an easy to use control interface with a large clear graphical display. It can quickly and easily be set up to work in either vacuum mode for precise measurement of leak rate or in sniffer mode for identifying leak location.
ELD500 Dry Leak Detector Features & Specifications
- Minimum detectable helium leak 3 x 10-11 mbar l/s
- Leak detection starting at an inlet pressure of 15 mbar
- Integrated helium optimized diaphragm pump
- Pumping speed during pumpdown (50 Hz) 1.6 m3 h-1
- Pumping speed during pumpdown (60 Hz) 1.8 m3 h-1
- Measurement range of 12 decades
- Color touch screen and large graphical display
- Data logging to local memory or USB stick
- Trend/bargraph leak rate display
- Minimum detectable helium leak 5 x 10-12 mbar l/s
- Maximum inlet test pressure 15 mbar
- Helium pumping speed in the fine mode 3.1 l/s
- Minimum detectable helium leak in sniffing mode 7 x 10-7 mbar l/s
ELD500 Leak Detector Applications:
- Semiconductor production
- Load Lock
- Transfer
- Metrology
- Lithography
- PVD (physical vapor deposition)
- Plasma etching
- Implant source
- CVD (chemical vapor deposition)
- Flat panel display
- LED
- Research and Development
- Space simulation
- Cryogenic research
- Nanotechnology
- Coating systems
- Analytical Instruments
- Electron microscopy
- Leak detection
- Mass spectrometry
- Surface analysis
- Industrial
- Industrial leak detection
- Electron beam welding
- Vacuum Furnaces
- Lamps and Tube Manufacturing
- Glass coating
- Brake line and air conditioning
- Refrigeration systems
- Heat treatment
- Power
- High energy physics
- Beam lines
- Accelerators
- Fusion
- Laser evacuation
| Edwards | Units | ELD 500 Wet | ELD 500 Dry | ELD 500 Flex |
|---|---|---|---|---|
| Sensitivity (vacuum) | mbar l/s | ≤ 5 · 10-12 | ≤ 3 · 10-11 | ≤ 5 · 10-12 |
| Sensitivity (sniffer) | mbar l/s | ≤ 7 · 10-9 | ≤ 7 · 10-9 | ≤ 7 · 10-9 |
| Max measurable leak rate He | mbar l/s | >0.1 | >0.1 | >0.1 |
| Measurement ranges | decades | 12 | 12 | 12 |
| Maximum inlet pressure | mbar | 15 | 15 | 15 |
| Helium pumping speed | l/s | 3.1 | 3.1 | 3.1 |
| Time until ready | min | ≤2 | ≤2 | ≤2 |
| Dimensions (w x h x d) | mm | 495 x 456 x 314 | 495 x 456 x 314 | 495 x 456 x 314 |
| Weight | kg | 40 | 35.5 | 30 |