The Oerlikon Leybold Vacuum Phoenix L320i Fab is a mobile helium leak detector designed for use in rooms with high cleanness requirements. It has a PHOENIX L300 leak detector unit with a backing pump. The backing pump is a dry compressing SCROLLVAC SC 30 DL fitted with an encapsulated housing to suppress the emission of particles. It’s lowest detectable leak rate for helium is 5 x 10-¹² mbar l/s.
The Phoenix L320i Fab has compact dimensions, high pumping speed and high detection sensitivity for helium to detect very small leaks. The L320i Fab is available to buy or rent.
Leak Detector Industries & Applications:
- Semiconductor production
- Research and Development
- Chemistry/Pharmaceutical
- Lamps and Tube Manufacturing
- Automotive Industry
- Particle Accelerators
- Analytical Engineering
- Quality Assurance
- Power Plants & Power Generation
- Systems with Cryopumps
- Cooling and Air Conditioning
- Electrical Engineering
- Industries with Vacuum Systems or Vacuum Processes
- High and Ultrahigh Vacuum Technology
- Mechanical Engineering
- Systems Engineering
- UHV applications
Leak Detector Functions & Specifications
- Integrated calibrated leak and automatic calibration
- Compact and mobile leak detector
- Low particle emissions
- Oil-free gas inlet system
- Measurement range of 12 decades
- Trend/bargraph leak rate display
- Minimum detectable helium leak 5.10-12 atm.cc/s
- Maximum inlet test pressure 15 mbar
- Helium pumping speed in vacuum mode 2.5 l/s
- Minimum detectable helium leak in sniffing mode 1.10-7 atm.cc/s
| Oerlikon Leybold | Units | PHOENIX L300 (oil-free) |
|---|---|---|
| Sensitivity (vacuum) | mbar l/s | ≤ 5 · 10-12 |
| Sensitivity (sniffer) | mbar l/s | ≤ 1 · 10-7 |
| Maximum inlet pressure | mbar | 15 |
| Helium pumping speed | l/s | >2.5 |
| Time until ready | min | ≤2 |
| Dimensions (w x h x d) | mm | 495 x 456 x 314 |
| Weight | kg | 40 |